Defects Documentation

  • Optional add-on for our Macro Inspection Unit
  • Automated documentation of macro defects under precisely the same viewing conditions as for the operator
  • Easy point-and-click registration of visually discovered defects with coordinate mapping and export
  • KLA-compatible file format export to enable convenient macro defect review, for example on a microscope
  • Classification by means of customer-defined defect list
  • DEDO is optionally available for MIT 300, MIT 301, MMT 300 and Axiospect 300 systems
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  • Country:Singapore
  • telephone:65-65-6382-1638
Optional add-on for our Macro Inspection Unit

Micro Optics Systems

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