Gas Disposal- Waste gas abatement system EQUULEUS
Product Details
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- Delivers continuous operation, 24 hours a day, 365 days a year.
- Uses catalysts.
- Incorporates filtration technology for removing particulate matter.
- Forced air design accelerates oxidation.
- Features a longer maintenance cycle and improved safety.
The Equuleus has a well-established track record of success, particularly with processes such as LP-CVD and PE-CVD that generate little particulate matter.Waste gas abatement in all CVD processes, ion implantation, and epitaxial processesProduct
Equuleus
ModelRW030D4EW010B2NW005X2Dimensions (mm)2140
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- Country:Japan
- telephone:81-06-1234-5678
| Delivers continuous operation, 24 hours a day, 365 days a year. |
