Gas Disposal- Waste gas abatement system NORUMA
Product Details
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- Delivers continuous operation, 24 hours a day, 365 days a year.
- Uses catalysts.
- Incorporates filtration technology for removing particulate matter.
- Forced air design accelerates oxidation.
- Features a longer maintenance cycle and improved safety.
The Noruma is ideal for processes such as ion implantation that generate few waste gases. It combines a compact footprint with long-term reliability.Waste gas abatement in all CVD processes, ion implantation, and epitaxial processesProduct
Noruma
ModelRW030D4EW010B2NW005X2Dimensions (mm)2140
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- Country:Japan
- telephone:81-06-1234-5678
| Delivers continuous operation, 24 hours a day, 365 days a year. |
