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It helps the plasma to spread evenly on the wafer and protects the wafer, ESC and electrodes. Types of Products : Focus Ring, Insert Ring, Collar Ring, Shield Ring, Hot Edge Ring, Protection Ring etc. |
It helps the plasma to spread evenly on the wafer and protects the wafer, ESC and electrodes.
| It helps the plasma to spread evenly on the wafer and protects the wafer, ESC and electrodes. |