Feedthrough Rotary Union
Product Details
I'm going to introduce our unique Sealing System for your devices.We have been developing updated rotary union in field of semiconductor ALD, PVD, CMP, CVD line for several years.It's good reputation is spready by our customers and good result of the highest techniques.In High Vacuum Conditions, like this Feedthroughs, Our products have leakage rate < 10^-11Pa. M^3/SRotary union(for 12 pots) which supplied to "D" customer's CMP equipment have been working well under a conditions of speed 120 RPMAnd limit leakage rate of 0.01 psi/min. Same as your company's operating specifications.The quality of equipment was ensured by "Samsung" and "LG" company who is chip maker.Already we changed from our Rotary Union for SpeedFam-IPEC CMP devices in "Dongbu-Anam" chip maker.Also, ALD equipment made by "J" company accepting our sealing system is ensured by another chip maker "Hynix" company.We can satisfy with customer's need using our various sealing system and can supply vertical or horizontal type unit suitable for variousEquipment conditions.We believe that you can up grade the quality of your products,If you apply our unique and compact type of sealing system and we hope to take a chance to business with you.If you have any question, Please send me your questionWe are waiting your any idea and good news.
I'm going to introduce our unique Sealing System for your devices.
We have been developing updated
- Model Number:SEALIA
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