a-Si back contact inline sputter
Product Details
Process zone:
-AZO sputtering
-Gas separation zone
-Ag-Al sputtering
Preheat temperature: 250oC
Cycle time: 60-90 sec
Speed range: 0.3 ~4 m/min
High vacuum pumps: Turbo pumps
Ultimate pressure: < 2x10-6 torr
Magnetron unit: BEKAERT Rotatable
Sputtering mode: DC / pulse-DC
Electrical control: PLC + iPC w/ win XP
HMI: 19 Touch-Screen
-AZO sputtering
-Gas separation zone
-Ag-Al sputtering
Preheat temperature: 250oC
Cycle time: 60-90 sec
Speed range: 0.3 ~4 m/min
High vacuum pumps: Turbo pumps
Ultimate pressure: < 2x10-6 torr
Magnetron unit: BEKAERT Rotatable
Sputtering mode: DC / pulse-DC
Electrical control: PLC + iPC w/ win XP
HMI: 19 Touch-Screen
- Country:Taiwan
- telephone:886-928-900315
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In-line back contact sputter for AZO/Ag(Al) deposition. Designed for 30MW a-Si solar cell production 1.1 m x1.4 m glass size |
