Greene, Tweed engineers strive to find solutions that make customers' challenges disappear. Our BSV (Bonded Slit Valve) Door increases the life expectancy and performance of a door's seal
during semiconductor processing. Before Greene, Tweed's BSV, O-ring replacement was the only option. BSV doors ease the replacement process--changing the complete BSV door assembly requires
simply removing and replacing a few bolts. Greene, Tweed's bonded design minimizes abrasion, leading to extended seal life and less particulation compared to the use of a typical
perfluoroelastomer O-ring.
MATERIALS
Elastomers
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LITERATURE
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