21700 Series 3 Position Gate Valve

21700 Series 3 Position Gate Valve
The 21700 Series Pneumatic 3-Position Gate Valves are designed for use in etching, CVD and any other process that requires pressure control. When used in conjunction with upstream mass flow controllers, this series valve will contribute to an exceptional pressure control capability. Valve positions are fully open, fully closed and any set third position. These valves may also be utilized to smooth the transition from rough to high vacuum.
mm 100 150 200 250 300
inch 4.0 6.0 8.0 10.0 12.0