Laser Pattern Generator

To repair opaque defects the system uses Lotis LS-2122M laser with wave length of 532 nm. Transparent defects are repaired through the laser stimulated deposition of metal-organic compounds. As a radiation source, the argon 185F02 Spectra Physics laser is used.

Advantages of the method:

For repair of opaque defects, a contour path-projection method of optical imaging is used: the image is sythesized as a result of the laser beam step-by-step tracing around a contour path, the laser beam cross-section being a microprojection of a simple figure, for example a square.

EM-5001B system is intended for repairing masks (reticles) having transparent and opaque defects: pindots, protrusions, shorts between features, missing features, corner rounding, pinholes, mouse bites, breaks, size shifts, etc. The system repairs defects on chrome, chrome-oxide, iron-oxide coated reticles having the following SEMI standard sizes:

Laser Mask Repair System is designed for repairing masks (reticles) having transparent and opaque defects