| Items | Parameters |
| Acquisition methods | Digital industrial camera |
| Microscope resolution | ≤3.3um |
| Microscope amplification | 22~136 |
| Microscope illumination | Concentration photovotaic |
| Travel base | ≤3um |
| Chord length range | ≤0.05mm |
| Test working hour | 5min ~10min |
| External dimension | 535mm×575mm×520mm |