OLED/PLED and Solar Cell Application

Suitable for metal, semi-conductor, oxidizing, and organic film, OLED, PLED, Solar, and other applications

Evaporator would be integrated into either the floor or side wall of the glove box

Available in many configurations and work station sizes

Evaporator pressure limit: 6 x 10-5 Pa

Evaporator pumping time: ≤40 minutes (from atmospheric pressure to 8 x 10-4 Pa)

Maximum substrate size: 120x120mm

Lifting range: 50mm

Rotating speed: 5-30rpm; continuously adjustable

Maximum substrate temperature: 300° C

Organic Evaporation Source: Two beam furnace; Single quartz crucible capacity ≥2 cc; Maximum temperature: -500° C; Continuously adjustable

Thermal Evaporation Source: Two thermal evaporation boats; Four electrodes; Water cooling; 10V 300A; Maxiumum power output 3kW

FTM-V quartz crystal oscillation film thickness monitor display range: 0–99µ9999À°