Inline Sputter Coating System
Product Details
4kgf/ cm2
Cooling Water
Convection or Pirani gaugeIon gauge
Vacuum Gauge
PLC or PC base
Electrical Control system
20
[kW]
Generator power per cathode
DC, pulsed DC, RF
Power Generator
Planar / Rotatable
Magnetrons Cathodes
< 5x10-5
[mbar]
Ultimate pressure
20...300
[]
Temp. Pretreatment
rotary pump / dry pump , diffusion pump / turbo pump / cryo pump
Vacuum Pumps
0.2 10
[m/min]
Speed range
Stainless Steel
Chamber Material
Technical Date
Htc develops key techniques for automobile lamp mask reflection coating equipment, cutting tool surface coating equipment, thin film PV solar cell coating system equipment, and provide clients with design service to expedite their development schedule and help them create better product profits as well as greater market shares.
- Country:Taiwan
- telephone:886-6-2460296
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Htc's coating equipments incuding to Inline Types and Batch Types. |
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