Parylene Vacuum laboratory equipment Model MQP-6001
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Specifications
Parylene Coating Equipment
Notes：1.The above equipments can be custom-made according to the customer's requirements.
2.The specific equipment parameters can be consulted.
|
Equipment Model
Main Parameter |
3001 | 6001 | 7001 | 8001 | 9001 |
| Voltage | 3 phases 380V 50Hz | ||||
| Power | 3KW | 5KW | 8KW | 10KW | 10KW |
| Overall Dimensions | 2000*1500*1000mm | 3000*1800*1500mm | |||
| Cavity Size | ø320*320mm | ø550*700mm | ø650*800mm | ø750*900mm | ø850*900mm |
| SuitableMaterials | Model: Parylene N/C/D/F | ||||
| Film Forming Rate | Type C≥5µm/h Type N≥0.8µm/hType D≥5µm/h Type F≥5µm/h | ||||
| DepositedFilmThickness | 0.001-100µm | 0.1-50µm | |||
| CoatingThicknessUniformity | Better than 2% | Better than 5% | |||
| Cavity VacuumDegree | ≤3.0*1-2Torr | ||||
| Supporting Devices | 1.Including one copeofprocess file ofsurface pre-treatment coupling agentforpromotingthe adhesion of the Parylene film layer to the substrate. 2.Withtheappliancefor loading in cavity, you can select one according to yourtechnologicalrequirementssuch asrolling coating,jiggingcoating,hanging coating. | ||||
| SafetyDevice | The device has a self-locking function,Ifanabnormityoccursin the course of operation, the device will alarm and stop running. | ||||
| MainStructures | It mainly consists of vacuum pumping and measuring system, vacuumcavitysystem, evaporation chamber, cracking chamber, deposition chamberheating system, high temperature quartz pipe system, cold trap filtration system, PLC control system and auxiliary system. |
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- Contact:Chenglong Jiang
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